ISO 20341-2003 PDF

Full title and description

ISO 20341:2003 — Surface chemical analysis — Secondary-ion mass spectrometry — Method for estimating depth resolution parameters with multiple delta-layer reference materials. The standard gives procedures for using multiple delta-layer reference materials to determine depth-resolution characteristics in SIMS depth profiling.

Abstract

Specifies procedures for estimating three depth-resolution parameters (leading-edge decay length, trailing-edge decay length and Gaussian broadening) when performing SIMS depth profiling using multiple delta-layer reference materials. It excludes delta-layers where the near-surface region is not in a steady state after modification by the incident primary ions.

General information

• Status: Published (confirmed by ISO review).
• Publication date: 2003-07.
• Publisher: International Organization for Standardization (ISO).
• ICS / categories: 71.040.40 (Surface chemical analysis).
• Edition / version: Edition 1 (2003).
• Number of pages: 5.

All items above are taken from the ISO bibliographic record for ISO 20341:2003 and its formal lifecycle information as published by ISO.

Scope

Defines measurement procedures and analysis steps to estimate depth-resolution parameters in secondary-ion mass spectrometry (SIMS) depth profiles using multiple delta-layer reference materials. It is intended to provide a reproducible approach to determine the leading- and trailing-edge decay lengths and the Gaussian broadening that characterize depth resolution. The standard explicitly does not apply where the sample’s near-surface state is altered by primary-ion exposure in a way that prevents a steady-state response.

Key topics and requirements

• Definition and measurement of three depth-resolution parameters: leading-edge decay length, trailing-edge decay length, and Gaussian broadening.
• Use of multiple delta-layer reference materials to derive resolution parameters in SIMS depth profiling.
• Procedures for preparing and analysing SIMS depth profiles to extract decay lengths and broadenings.
• Limitations and applicability — not applicable when near-surface steady state is not achieved after ion bombardment.
• Requirements for reporting measured resolution parameters and conditions of the measurement to ensure reproducibility.

Typical use and users

Used by surface analysis laboratories, materials scientists, semiconductor process and failure-analysis teams, instrument manufacturers, and organizations producing reference materials for SIMS. Typical applications include characterization of thin-film interfaces, calibration of depth scales in SIMS, and validation of instrument performance for depth profiling.

Related standards

ISO 20341:2003 sits within the ISO surface chemical analysis family (ISO/TC 201). Other related SIMS and surface-analysis standards include various ISO documents addressing depth calibration, reporting and related SIMS practices; these are maintained under the same ICS area for surface chemical analysis.

Keywords

SIMS, secondary-ion mass spectrometry, depth profiling, depth resolution, leading-edge decay length, trailing-edge decay length, Gaussian broadening, delta-layer reference materials, surface chemical analysis.

FAQ

Q: What is this standard?

A: An ISO international standard (ISO 20341:2003) that specifies methods to estimate depth-resolution parameters in SIMS depth profiling using multiple delta-layer reference materials.

Q: What does it cover?

A: Procedures to determine leading-edge and trailing-edge decay lengths and Gaussian broadening from SIMS profiles measured on multiple delta-layer reference materials, and the limits of applicability (excludes non–steady-state near-surface conditions).

Q: Who typically uses it?

A: Surface-analytical laboratories, materials and semiconductor researchers, instrument manufacturers, and organizations involved in reference-material production and instrument calibration for SIMS depth profiling.

Q: Is it current or superseded?

A: The 2003 edition (Edition 1) remains the current published version; ISO’s bibliographic record shows the publication was reviewed and confirmed in ISO’s review process (confirmed in 2025), so the document remains current in ISO’s catalogue.

Q: Is it part of a series?

A: It is part of the broader set of ISO standards on surface chemical analysis (work of ISO/TC 201 and its subcommittees). Other standards in the same ICS area address related SIMS procedures, depth calibration and reporting for surface analysis.

Q: What are the key keywords?

A: SIMS; secondary-ion mass spectrometry; depth profiling; depth resolution; delta-layer reference materials; leading-edge decay length; trailing-edge decay length; Gaussian broadening.