GOST 25196-82

GOST 25196-82

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Name in English:
GOST 25196-82

Name in Russian:
ГОСТ 25196-82

Description in English:

Vacuum equipment. Apparatus for ion implantation. General technical requirements

Description in Russian:
Оборудование вакуумное. Установки для ионной имплантации. Общие технические требования

Document status:

Active

Format:

Electronic (PDF)

Page count:

3

Delivery time (for English version):

1 business day

Delivery time (for Russian version):

1 business day

SKU:

GOST08473