State system for ensuring the uniformity of measurements Instruments measuring the characteristics of ultraviolet radiation of technological testing of nanophotolitography. Verification procedure

Description in Russian:
Государственная система обеспечения единства измерений. Средства измерений характеристик ультрафиолетового излучения при технологическом контроле в нанофотолитографии. Методика поверки

Document status:

Active

Format:

Electronic (PDF)

Page count:

Delivery time (for English version):

2 business days

Delivery time (for Russian version):

1 business day

SKU:

GOST29364